E-GRADE® Choline Hydroxide is a clear aqueous solution with a high pH and a mild odor. It has a very low corrosion rate on copper and other metallic surfaces and has been demonstrated to effectively remove both positive and negative photoresists. The product is an effective replacement for TMAH and is available in higher concentrations than TMAH in both water and organic solvents (for R&D). The combination of low corrosion rates, photoresist removal, etching, and lower toxicity makes E-GRADE® Choline Hydroxide an effective, safer-to-handle alternative to TMAH in next-generation semiconductor cleans, with performance enhancements such as faster photoresist removal rates and selective metal removal rates.
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